| 000 -LEADER |
|---|
| fixed length control field |
01254 a2200253 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
Nust |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20221201131137.0 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
82010842 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471868337 : |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
Nust |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38171,GHA |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Ghandhi, Sorab Khushro, |
| 9 (RLIN) |
103907 |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
VLSI fabrication principles : |
| Remainder of title |
silicon and gallium arsenide / |
| Statement of responsibility, etc. |
Sorab K. Ghandhi. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York : |
| Name of publisher, distributor, etc. |
Wiley, |
| Date of publication, distribution, etc. |
c1983. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi, 665 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 505 ## - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Material Properties (Page-1), Phase Diagrams and Solid Solubility (Page-49), Crystal Growth and Doping (Page-81), Diffusion (Page-111), Epitaxy (Page-213), Ion Implantation (Page-299), Native Oxide Films (Page-371), Deposits Films (Page-419), Etching and Cleaning (Page-475), Lithographic Processes (Page-533), Device and Circuits Fabrication (Page-567), The Mathematics of Diffusion (Page-639). |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Gallium arsenide. |
| 9 (RLIN) |
103908 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon. |
| 9 (RLIN) |
103909 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Telecommunication Engineering |
| 740 0# - ADDED ENTRY--UNCONTROLLED RELATED/ANALYTICAL TITLE |
|---|
| Uncontrolled related/analytical title |
V.L.S.I. fabrication principles. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0607/82010842-d.html">http://www.loc.gov/catdir/enhancements/fy0607/82010842-d.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0607/82010842-t.html">http://www.loc.gov/catdir/enhancements/fy0607/82010842-t.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
Book |
