MEMS materials and processes handbook / (Record no. 33242)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01837cam a22003977a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 16626316 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20211021103124.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 110127s2011 nyua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2011921730 |
| 015 ## - NATIONAL BIBLIOGRAPHY NUMBER | |
| National bibliography number | GBB047220 |
| Source | bnb |
| 016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER | |
| Record control number | 015523393 |
| Source | Uk |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780387473161 (hbk.) |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)ocn587110610 |
| 038 ## - RECORD CONTENT LICENSOR | |
| Staff Name | khadija |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UKM |
| Transcribing agency | UKM |
| Modifying agency | BTCTA |
| -- | YDXCP |
| -- | INT |
| -- | VLB |
| -- | DLC |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | lccopycat |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TJ163 |
| Item number | .M46 2011 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Edition number | 22 |
| Author Mark | MEM |
| 245 00 - TITLE STATEMENT | |
| Title | MEMS materials and processes handbook / |
| Statement of responsibility, etc. | Reza Ghodssi, Pinyen Lin, editors. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York ; |
| -- | London : |
| Name of publisher, distributor, etc. | Springer, |
| Date of publication, distribution, etc. | c2011. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxxv, 1187 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | MEMS reference shelf |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration. |
| 563 ## - BINDING INFORMATION | |
| Binding note | Hardcover |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectromechanical systems |
| General subdivision | Materials. |
| 9 (RLIN) | 83310 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectromechanical systems. |
| 9 (RLIN) | 55756 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Ghodssi, Reza. |
| 9 (RLIN) | 83311 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lin, Pinyen. |
| 9 (RLIN) | 83312 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | MEMS reference shelf. |
| 9 (RLIN) | 83313 |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | copycat |
| d | 2 |
| e | ncip |
| f | 20 |
| g | y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Book |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Date last checked out | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| School of Mechanical & Manufacturing Engineering (SMME) | School of Mechanical & Manufacturing Engineering (SMME) | General Stacks | 01/18/2016 | 1 | 621.381 MEM | SMME-1983 | 03/29/2018 | 01/09/2018 | 01/18/2016 | Book |