| 000 -LEADER |
|---|
| fixed length control field |
01859cam a2200349 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
10190379 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
Nust- CAS-E |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20180118181402.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS |
|---|
| fixed length control field |
m d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
|---|
| fixed length control field |
cr n |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120502s2012 waua sb 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780819490926 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
081949092X |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(WaSeSS)ssj0000819238 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
DLC |
| -- |
WaSeSS |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.85 |
| Item number |
.X53 2012 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815/2 |
| Edition number |
23 |
| Author Mark |
XIA 2012 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Xiao, Hong. |
| 210 10 - ABBREVIATED TITLE |
|---|
| Abbreviated title |
Introduction to semiconductor technology |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Introduction to semiconductor technology |
| Medium |
[electronic resource] / |
| Statement of responsibility, etc. |
Hong Xiao. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Bellingham, Wash. : |
| Name of publisher, distributor, etc. |
SPIE, |
| Date of publication, distribution, etc. |
c2012. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE |
|---|
| Terms governing access |
License restrictions may limit access. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductor industry. |
| 773 #0 - HOST ITEM ENTRY |
|---|
| Title |
SPIE Digital Library (Books) |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379">http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379</a> |
| Public note |
Full text available from SPIE Digital Library (Books) |
| 910 ## - USER-OPTION DATA (OCLC) |
|---|
| User-option data |
Library of Congress record |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
Book |
