| 000 -LEADER |
|---|
| fixed length control field |
01577cam a2200385 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
13749338 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
USPCAS-E |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20180118181421.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
041013s2005 njua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2004058503 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471720011 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocm56752658 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
IAY |
| -- |
C#P |
| -- |
OCL |
| -- |
IXA |
| -- |
BAKER |
| -- |
DLC |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
QC718.5.D9 |
| Item number |
L54 2005 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
530.44 |
| Edition number |
22 |
| Author Mark |
LIE-P 2005 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lieberman, M. A. |
| Fuller form of name |
(Michael A.) |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Principles of plasma discharges and materials processing / |
| Statement of responsibility, etc. |
Michael A. Lieberman, Allan J. Lichtenberg. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
Wiley-Interscience, |
| Date of publication, distribution, etc. |
c2005. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxxv, 757 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 502 ## - DISSERTATION NOTE |
|---|
| Dissertation note |
. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references (p. 735-748) and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma dynamics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Thin films |
| General subdivision |
Surfaces. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma etching. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma chemistry |
| General subdivision |
Industrial applications. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lichtenberg, Allan J. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Contributor biographical information |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0618/2004058503-b.html">http://www.loc.gov/catdir/enhancements/fy0618/2004058503-b.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0618/2004058503-d.html">http://www.loc.gov/catdir/enhancements/fy0618/2004058503-d.html</a> |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0618/2004058503-t.html">http://www.loc.gov/catdir/enhancements/fy0618/2004058503-t.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
orignew |
| d |
1 |
| e |
ocip |
| f |
20 |
| g |
y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
Book |
