Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 63605

003 - CONTROL NUMBER IDENTIFIER

• control field: NUST

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20210628203137.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 210628|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NUST
• Transcribing agency: NUST

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: MATERIALS SCIENCE IN MICROELECTRONICS

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NUST): Machlin, E.S 63604, Materials science in microelectronics , the relationships between thin film processing and structure, 2005