Normal view
MARC view
- MICROELECTROMECHANICAL SYSTEMS.MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION.MICROFABRICATION
MICROELECTROMECHANICAL SYSTEMS.MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION.MICROFABRICATION (Topical Term)
Machine generated authority record.
Work cat.: (NUST): Mohamed Gad-El-Hak, Gad-El-Hak , Mohamed 63897, The mems handbook, mems design and fabrication, 2006
