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- MICROELECTROMECHANICAL SYSTEMS.NANOELECTROMECHANICAL SYSTEMS
MICROELECTROMECHANICAL SYSTEMS.NANOELECTROMECHANICAL SYSTEMS (Topical Term)
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Work cat.: (NUST): Madou, Marc.J 67994, Fundamentals of microfabricaiton and nanotechnology, solid - state physics, fluidics, and analytical techniques in micro and nanotechnology, 2012