Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 73675

003 - CONTROL NUMBER IDENTIFIER

• control field: NUST

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20210628205045.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 210628|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NUST
• Transcribing agency: NUST

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: SEMICONDUCTOR FABRICATION

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NUST): May, Gary S:Sze, Simon M 73674, Fundamentals of semiconductor fabrication, 2004