Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 83310

003 - CONTROL NUMBER IDENTIFIER

• control field: NUST

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20211021103123.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 211021|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NUST
• Transcribing agency: NUST

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Microelectromechanical systems
• General subdivision: Materials

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NUST)33242: MEMS materials and processes handbook /, c2011.