Analysis and Design principles of MEMS Devices / Minhang Bao
Publisher: Amsterdam ELsevier 2005Description: 312: pSubject(s): Telecommunication EngineeringDDC classification: 621.381,BAO
Contents:
Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247),
| Item type | Current location | Home library | Shelving location | Call number | URL | Status | Notes | Date due | Barcode | Item holds |
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Reference
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Military College of Signals (MCS) | Military College of Signals (MCS) | Reference | 621.381,BAO (Browse shelf) | Link to resource | Not for loan | Almirah No.20, Shelf No.1 | MCS32436 |
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Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247),

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