Analysis and Design principles of MEMS Devices / Minhang Bao

By: Minhang BaoPublisher: Amsterdam ELsevier 2005Description: 312: pSubject(s): Telecommunication EngineeringDDC classification: 621.381,BAO
Contents:
Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247),
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Item type Current location Home library Shelving location Call number URL Status Notes Date due Barcode Item holds
Reference Reference Military College of Signals (MCS)
Military College of Signals (MCS)
Reference 621.381,BAO (Browse shelf) Link to resource Not for loan Almirah No.20, Shelf No.1 MCS32436
Total holds: 0

Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247),

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