Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrovic.
Series: Series in plasma physics: Publisher: [S.l.] : Taylor & Francis, 2006Description: 360 p. ; 16 cmISBN: 0750309768; 9780750309769DDC classification: 620.044| Item type | Current location | Home library | Call number | Status | Date due | Barcode | Item holds |
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Book
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School of Natural Sciences (SNS) | School of Natural Sciences (SNS) | 620.044 MAK (Browse shelf) | Available | SNS0000991 |
Total holds: 0
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