00331nam a22001217a 4500020001800000082001600018100001800034245002100052260004700073300002300120650005100143700001500194  a9780521897716  a621.381 LUC  aLucyszyn, S.   aAdvanced RF MEMS  aNew YorkbCambridge University Pressc2010  axx, 412p. :e22 cm  aRadio frequency microelectromechanical systems  aS Lucyszyn