TY  - BOOK
AU  - Lucyszyn, S. 
AU  - S Lucyszyn
TI  - Advanced RF MEMS
SN  - 9780521897716
U1  - 621.381 LUC 
PY  - 2010///
CY  - New York
PB  - Cambridge University Press
KW  - Radio frequency microelectromechanical systems
ER  -