@book{11690,
	author = {Hsu, Tai-Ran.},
	title = {MEMS and microsystems : design, manufacture, and nanoscale engineering },
	publisher = {John Wiley,},
	year = {c2008.},
	address = {Hoboken, N.J. :},
	edition = {2nd ed.},
	url = {http://www.loc.gov/catdir/toc/ecip0716/2007017041.html}
}