Liu, Chang,  <br/><br/>
Foundations of MEMS 

 - 2nd ed. 
 - New Delhi  Pearson  2011 
 - 576 p.  ill. ;  24 cm. 
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>621.381