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  <titleInfo>
    <title>Springer handbook of nanotechnology</title>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Handbook of nanotechnology</title>
  </titleInfo>
  <name type="personal">
    <namePart>Bhushan, Bharat</namePart>
    <namePart type="date">1949-</namePart>
  </name>
  <typeOfResource/>
  <originInfo>
    <place>
      <placeTerm type="text">Berlin</placeTerm>
    </place>
    <place>
      <placeTerm type="text">New York</placeTerm>
    </place>
    <publisher>Springer</publisher>
    <dateIssued>c2004</dateIssued>
    <issuance/>
  </originInfo>
  <physicalDescription>
    <extent>xxxvi, 1222 p. : ill. ; 25 cm. + 1 CD-ROM (4 3/4 in.)</extent>
  </physicalDescription>
  <tableOfContents>Nanostructures, Micro/Nanofabrication, and Micro/Nanodevices (Page-9), Scanning Probe Microscopy (Page-325), Nanotribology and Nanomechanics (Page-497), Molecularly Thick Films for Lubrication (Page-791), Industrial Applications and Microdevice Reliability (Page-899), Social and Ethical Implication (Page-1135).</tableOfContents>
  <note type="statement of responsibility">Bharat Bhushan (ed.).</note>
  <subject authority="lcsh">
    <topic>Nanotechnology</topic>
  </subject>
  <classification authority="ddc">620.5,SPR</classification>
  <identifier type="isbn">3540012184 (alk. paper)</identifier>
  <identifier type="lccn">2003064953</identifier>
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    <recordChangeDate encoding="iso8601">20220802131856.0</recordChangeDate>
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