Minhang Bao <br/><br/>
Analysis and Design principles of MEMS Devices / 
Minhang Bao 
 - Amsterdam  ELsevier  2005 
 - 312: p 
<br/><br/>Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247),  
<br/><br/><label>ISBN: </label> 0444516166 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Telecommunication Engineering.
<br/><br/><label>Dewey Class. No.: </label>621.381,BAO