Minhang Bao creator Amsterdam ELsevier 2005 312: p Introduction to MEMS devices (Page-1), Mechanics of beam and diaphragm structures (Page-33), Air damping (Page-115), Electrostatic actuation (Page-175), Capacitive sensing and effects of electrical excitation (Page-213), Piezoresistive sensing (Page-247), Minhang Bao Telecommunication Engineering 621.381,BAO 20230825093802.0