@book{182215,
	author = {Ghandhi, Sorab Khushro,},
	title = {VLSI fabrication principles :},
	publisher = {Wiley,},
	year = {c1983.},
	address = {New York :},
	url = {http://www.loc.gov/catdir/enhancements/fy0607/82010842-d.html}
}