01048 a2200229 4500 Nust 20221201151817.0 2002276015 0201146959 Nust 621.38152,JAE Jaeger, Richard C. 55586 Introduction to microelectronic Fabrication / Richard C. Jaeger. vol 5 Upper Saddle River, N.J. : Prentice Hall, c2002. xiv,232 p. : ill. ; 24 cm. Modular series on solid state devices ; v. 5 An Overview of Microelectronic Fabrication (Page-1), Lithography (Page-13), Thermal Oxidation of Silicon (Page-29), Diffusion (Page-49), Ion Implantations (Page-89), Film Deposition (Page-107), Interconnections and Contacts (Page-133), Packing and Yield (Page-153), MOS Process Integration (Page-173), Bipolar Process Integration (Page-201). Telecommunication Engineering Modular series on solid state devices (Upper Saddle River, N.J.) ; 55588 ddc BK 182248 182248 0 0 ddc 0 0 MCS MCS GEN 2016-12-12 621.38152,JAE MCS575 2016-12-08 2016-12-12 BK Almirah No.33, Shelf No.5