Fujita, Hiroyuki. <br/><br/>
Micromachines as tools for nanotechnology / 
Hiroyuki Fujita. 
 - [S.l.] :  Springer,  2003. 
 - 224 p. ;  25 cm. 
 - Microtechnology and mems. .
 - Microtechnology and mems. .
<br/><br/><label>ISBN: </label>354000856X 9783540008569 
<br/><br/><label>Dewey Class. No.: </label>620.5