TY  - GEN
AU  - Fujita, Hiroyuki.
AU  - Fujita,Hiroyuki
TI  - Micromachines as tools for nanotechnology
T2  - Microtechnology and mems
SN  - 354000856X
U1  - 620.5 
PY  - 2003///
CY  - [S.l.]
PB  - Springer
ER  -