TY  - GEN
AU  - Makabe,T.
AU  - Petrovic,Z.
TI  - Plasma electronics: applications in microelectronic device fabrication 
T2  - Series in plasma physics
SN  - 0750309768
U1  - 620.044 
PY  - 2006///
CY  - [S.l.]
PB  - Taylor & Francis
ER  -