00262    a2200109   450000100060000008200180000610000190002424500680004325000060011126000260011730000090014363732  a621.38152 GHA  aGhandhi, Sorab  aVLSI Fabrication Principles : silicon and gallium arsenide, 2/e  a2  aN.YbJohn Wileyc1994  a860p