@book{31546,
	author = {May, Gary S. and Sze, S. M.,},
	title = {Fundamentals of semiconductor fabrication /},
	publisher = {Wiley,},
	year = {c2004.},
	address = {New York :},
	edition = {Wiley international ed.},
	url = {http://www.loc.gov/catdir/bios/wiley044/2003276248.html}
}