<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>01460cam a22003857a 4500</leader>
  <controlfield tag="001">13308201</controlfield>
  <controlfield tag="003">OSt</controlfield>
  <controlfield tag="005">20211022103928.0</controlfield>
  <controlfield tag="008">030811s2004    nyua     b    001 0 eng d</controlfield>
  <datafield tag="010" ind1=" " ind2=" ">
    <subfield code="a">  2003276248</subfield>
  </datafield>
  <datafield tag="015" ind1=" " ind2=" ">
    <subfield code="a">GBA3-Y5182</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">0471232793</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(OCoLC)ocm51838570</subfield>
  </datafield>
  <datafield tag="038" ind1=" " ind2=" ">
    <subfield code="a">khadija</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">UKM</subfield>
    <subfield code="c">UKM</subfield>
    <subfield code="d">HKP</subfield>
    <subfield code="d">FUG</subfield>
    <subfield code="d">DLC</subfield>
  </datafield>
  <datafield tag="042" ind1=" " ind2=" ">
    <subfield code="a">lccopycat</subfield>
  </datafield>
  <datafield tag="050" ind1="0" ind2="0">
    <subfield code="a">TK7871.85</subfield>
    <subfield code="b">.M378 2004</subfield>
  </datafield>
  <datafield tag="082" ind1="0" ind2="0">
    <subfield code="a">621.38152</subfield>
    <subfield code="2">22</subfield>
    <subfield code="b">MAY</subfield>
  </datafield>
  <datafield tag="100" ind1="1" ind2=" ">
    <subfield code="a">May, Gary S.</subfield>
    <subfield code="9">35779</subfield>
  </datafield>
  <datafield tag="245" ind1="1" ind2="0">
    <subfield code="a">Fundamentals of semiconductor fabrication /</subfield>
    <subfield code="c">Gary S. May, Simon M. Sze.</subfield>
  </datafield>
  <datafield tag="250" ind1=" " ind2=" ">
    <subfield code="a">Wiley international ed.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">New York :</subfield>
    <subfield code="b">Wiley,</subfield>
    <subfield code="c">c2004.</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xiii, 305 p. :</subfield>
    <subfield code="b">ill. ;</subfield>
    <subfield code="c">26 cm.</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographical references and index.</subfield>
  </datafield>
  <datafield tag="563" ind1=" " ind2=" ">
    <subfield code="a">paperback</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Semiconductors</subfield>
    <subfield code="x">Design and construction.</subfield>
    <subfield code="9">35780</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Integrated circuits</subfield>
    <subfield code="x">Design and construction.</subfield>
    <subfield code="9">35781</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Sze, S. M.,</subfield>
    <subfield code="d">1936-</subfield>
    <subfield code="9">35782</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="2">
    <subfield code="3">Contributor biographical information</subfield>
    <subfield code="u">http://www.loc.gov/catdir/bios/wiley044/2003276248.html</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="2">
    <subfield code="3">Publisher description</subfield>
    <subfield code="u">http://www.loc.gov/catdir/description/wiley037/2003276248.html</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="1">
    <subfield code="3">Table of contents</subfield>
    <subfield code="u">http://www.loc.gov/catdir/toc/wiley032/2003276248.html</subfield>
  </datafield>
  <datafield tag="906" ind1=" " ind2=" ">
    <subfield code="a">7</subfield>
    <subfield code="b">cbc</subfield>
    <subfield code="c">copycat</subfield>
    <subfield code="d">2</subfield>
    <subfield code="e">ncip</subfield>
    <subfield code="f">20</subfield>
    <subfield code="g">y-gencatlg</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="2">ddc</subfield>
    <subfield code="c">BK</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">31546</subfield>
    <subfield code="d">31546</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="2">ddc</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="a">SMME</subfield>
    <subfield code="b">SMME</subfield>
    <subfield code="c">GEN</subfield>
    <subfield code="d">2015-06-25</subfield>
    <subfield code="l">1</subfield>
    <subfield code="o">621.38152 MAY</subfield>
    <subfield code="p">SMME-50</subfield>
    <subfield code="r">2025-10-07</subfield>
    <subfield code="s">2025-09-08</subfield>
    <subfield code="w">2015-06-25</subfield>
    <subfield code="y">BK</subfield>
  </datafield>
</record>
