01484cam a22003857a 450000100090000000300040000900500170001300800410003001000170007101500150008802000150010303500230011803800120014104000280015304200140018105000260019508200230022110000240024424500760026825000280034426000310037230000350040350400510043856300140048965000520050365000570055570000300061285600980064285600900074085600780083090600450090894200120095399900170096595201160098213308201OSt20211022103928.0030811s2004    nyua     b    001 0 eng d  a  2003276248  aGBA3-Y5182  a0471232793  a(OCoLC)ocm51838570  akhadija  aUKMcUKMdHKPdFUGdDLC  alccopycat00aTK7871.85b.M378 200400a621.38152222bMAY1 aMay, Gary S.93577910aFundamentals of semiconductor fabrication /cGary S. May, Simon M. Sze.  aWiley international ed.  aNew York :bWiley,cc2004.  axiii, 305 p. :bill. ;c26 cm.  aIncludes bibliographical references and index.  apaperback 0aSemiconductorsxDesign and construction.935780 0aIntegrated circuitsxDesign and construction.9357811 aSze, S. M.,d1936-935782423Contributor biographical informationuhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html423Publisher descriptionuhttp://www.loc.gov/catdir/description/wiley037/2003276248.html413Table of contentsuhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html  a7bcbcccopycatd2encipf20gy-gencatlg  2ddccBK  c31546d31546  00102ddc4070aSMMEbSMMEcGENd2015-06-25l1o621.38152 MAYpSMME-50r2025-10-07s2025-09-08w2015-06-25yBK