Liu, Ai-Qun. RF MEMS switching and integrated switching circuits : design, fabrication and test / Ai Qun Liu ; chapter co-authors, Aibin Yu ... [et al.]. - New York : Springer, c2010. - MEMS reference shelf . Includes bibliographical references and index. License restrictions may limit access. Hardcover ISBN: 9780387462615 (alk. paper) = RF MEMS switching and integrated switching circuits Subjects--Topical Terms: Radio frequency microelectromechanical systems.Switching circuits.Integrated circuits. LC Class. No.: TK7875 / .L478 2010 Dewey Class. No.: 621.381537 / LIV