TY - BOOK AU - Eleftheriou,Evangelos AU - Moheimani,S.O.Reza TI - Control technologies for emerging micro and nanoscale systems T2 - Lecture notes in control and information sciences, SN - 9783642221729 (alk. paper) AV - TJ213 .C57295 2011 U1 - 629.8 23 PY - 2011/// CY - Berlin PB - Springer Verlag KW - Microelectromechanical systems KW - Automatic control KW - Microscopy N1 - License restrictions may limit access UR - http://www.columbia.edu/cgi-bin/cul/resolve?clio9059941 ER -