TY  - BOOK
AU  - Younis,Mohammad I.
TI  - MEMS linear and nonlinear statics and dynamics
T2  - Microsystems
SN  - 9781441960191 (hbk. : alk. paper)
AV  - TK7875 .Y68 2010
U1  - 621.3810113 22
PY  - 2010///
CY  - New York, London
PB  - Springer
KW  - Microelectromechanical systems
KW  - Mathematical models
KW  - Statics
KW  - Dynamics
N1  - Includes bibliographical references and index
ER  -