MEMS materials and processes handbook / 
Reza Ghodssi, Pinyen Lin, editors. 
 - New York ;  London :  Springer,  c2011. 
 - xxxv, 1187 p. :  ill. ;  24 cm. 
 - MEMS reference shelf .
 - MEMS reference shelf. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration. 
<br/><br/> Hardcover 
<br/><br/><label>ISBN: </label>9780387473161 (hbk.) 
<br/><br/><label>LCCN: </label>2011921730 
<br/><br/><label>Nat. Bib. No.: </label>GBB047220  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>015523393  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Materials.<br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TJ163  / .M46 2011 
<br/><br/><label>Dewey Class. No.: </label>621.381  / MEM