TY  - BOOK
AU  - Ghodssi,Reza
AU  - Lin,Pinyen
TI  - MEMS materials and processes handbook
T2  - MEMS reference shelf
SN  - 9780387473161 (hbk.)
AV  - TJ163 .M46 2011
U1  - 621.381 22
PY  - 2011///
CY  - New York, London
PB  - Springer
KW  - Microelectromechanical systems
KW  - Materials
N1  - Includes bibliographical references and index; The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration
ER  -