TY  - BOOK
AU  - Tu,K.N.
AU  - Mayer,James W.
AU  - Feldman,Leonard C.
TI  - Electronic thin film science: for electrical engineers and materials scientists 
SN  - 0024215759
AV  - QC176.9.M84 T83 1992
U1  - 621.381/52 20
PY  - 1992///
CY  - New York, Toronto, New York
PB  - Macmillan, Maxwell Macmillan Canada, Maxwell Macmillan International
KW  - Thin films, Multilayered
KW  - Electrical engineering
KW  - Materials
N1  - Includes bibliographical references and index
ER  -