@book{355457,
	author = {Xiao, Hong.},
	title = {Introduction to semiconductor technology},
	publisher = {SPIE,},
	year = {c2012.},
	address = {Bellingham, Wash. :},
	edition = {2nd ed.},
	url = {http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379}
}