Xiao, Hong. <br/><br/>
Introduction to semiconductor technology  [electronic resource] / 
Hong Xiao. 
 - 2nd ed. 
 - Bellingham, Wash. :  SPIE,  c2012. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index. 
<br/><br/> License restrictions may limit access. 
<br/><br/><label>ISBN: </label>9780819490926 081949092X 
 = Introduction to semiconductor technology 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Semiconductor industry.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .X53 2012 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / XIA 2012