01859cam a2200349 a 4500 10190379 Nust- CAS-E 20180118181402.0 m d cr n 120502s2012 waua sb 001 0 eng d 9780819490926 081949092X (WaSeSS)ssj0000819238 DLC DLC DLC WaSeSS TK7871.85 .X53 2012 621.3815/2 23 XIA 2012 Xiao, Hong. Introduction to semiconductor technology Introduction to semiconductor technology [electronic resource] / Hong Xiao. 2nd ed. Bellingham, Wash. : SPIE, c2012. Includes bibliographical references and index. Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index. License restrictions may limit access. Semiconductors Design and construction. Semiconductor industry. SPIE Digital Library (Books) http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379 Full text available from SPIE Digital Library (Books) Library of Congress record ddc BK 355457 355457 0 0 ddc 0 0 NFIC CAS-E CAS-E GEN 2013-11-11 Eagle Information Books 0 621.3815/2 XIA 2012 CAS-E0000442 2014-08-27 2014-08-27 BK