Xiao, Hong. creator text bibliography wau Bellingham, Wash SPIE c2012 2012 2nd ed. monographic eng

electronic

electronic resource

Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary -- Index. Hong Xiao. Includes bibliographical references and index. License restrictions may limit access. Semiconductors Design and construction Semiconductor industry TK7871.85 .X53 2012 621.3815/2 XIA 2012 9780819490926 081949092X http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379 http://www.columbia.edu/cgi-bin/cul/resolve?clio10190379 License restrictions may limit access. DLC 120502 20180118181402.0 10190379