Ohring, Milton, 1936- Materials science of thin films : deposition and structure / Milton Ohring. - 2nd ed. - San Diego, CA : Academic Press, 2002. - xxi, 794 p. : ill. ; 24 cm. Includes bibliographical references and index. ISBN: 0125249756 LCCN: 2001089414 Subjects--Topical Terms: Thin films. LC Class. No.: TA418.9.T45 / O47 2002 Dewey Class. No.: 621.38152 / OHR-M 2002