Ohring, Milton, 1936-

Materials science of thin films : deposition and structure / Milton Ohring. - 2nd ed. - San Diego, CA : Academic Press, 2002. - xxi, 794 p. : ill. ; 24 cm.



Includes bibliographical references and index.

0125249756

2001089414


Thin films.

TA418.9.T45 / O47 2002

621.38152 / OHR-M 2002