TY - BOOK AU - Ohring,Milton TI - Materials science of thin films: deposition and structure SN - 0125249756 AV - TA418.9.T45 O47 2002 U1 - 621.38152 22 PY - 2002/// CY - San Diego, CA PB - Academic Press KW - Thin films N1 - Includes bibliographical references and index UR - http://www.loc.gov/catdir/description/els031/2001089414.html UR - http://www.loc.gov/catdir/toc/els031/2001089414.html UR - http://www.e-streams.com/es0505/es0505_1873.htm ER -