@book{355988,
	author = {Mattox, D. M. and ebrary, Inc.},
	title = {Handbook of physical vapor deposition (PVD) processing},
	publisher = {Elsevier,},
	year = {2010.},
	address = {Amsterdam :},
	edition = {2nd ed.},
	url = {http://www.columbia.edu/cgi-bin/cul/resolve?clio8569414}
}