TY  - BOOK
AU  - Mattox,D.M.
ED  - ebrary, Inc.
TI  - Handbook of physical vapor deposition (PVD) processing
AV  - TS695 .M38 2010eb
U1  - 671.735 22
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Physical vapor deposition
KW  - Handbooks, manuals, etc
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; License restrictions may limit access
UR  - http://www.columbia.edu/cgi-bin/cul/resolve?clio8569414
ER  -