00285nam a2200097Ia 4500008004100000082001900041100002400060245006100084260003300145300000900178210428s9999    xx            000 0 und d  a530.44 L7161 P  aMichael A.Lieberman 0aPrinciples of Plasma Discharges and Materials Processing  bJohn WileyaNew Jerseyc2005  a757p