00329nam a2200109Ia 4500008004100000020002200041082001900063100001900082245007600101260003200177300001000209210430s9999    xx            000 0 und d  a978-81-7992-906-3  a537.6 S47111 S  aGary E.McGuire  aSemiconductor Materials and Process Technology HandbookcGary E.McGuire  aUSAbJaico Publishingc2008  a675 p