TY  - BOOK
AU  - Hans H. Gatzen, Volker Saile, Jurg Leuthold
TI  - Micro and Nano Fabrication Tool and Processes
SN  - 978-3-662-44394-1
U1  - 670 G258M 
PY  - 2015///
CY  - New York
PB  - Springer
ER  -