Pelesko, John A, Bernstein, David H <br/><br/>
Modeling MEMS and NEMS / 
John A. Pelesko and David H. Bernstein. 
 - Boca Raton, FL :  Chapman & Hall/CRC,  2003. 
 - xxiii, 357 p. :  ill. ; 24 cm. 
<br/><br/>Includes bibliographical references and i(p. 325-340) and index. 
<br/><br/><label>ISBN: </label>1584883065 (alk. paper) 
<br/><br/><label>LCCN: </label>2002031599 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Mathematical models.
<br/><br/><label>LC Class. No.: </label>TK7875  / .P45 2003 
<br/><br/><label>Dewey Class. No.: </label>621.3