<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Modeling MEMS and NEMS</title>
  </titleInfo>
  <name type="personal">
    <namePart>Pelesko, John A, Bernstein, David H</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Bernstein, David H.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">flu</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Boca Raton, FL</placeTerm>
    </place>
    <publisher>Chapman &amp; Hall/CRC</publisher>
    <dateIssued>2003</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xxiii, 357 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">John A. Pelesko and David H. Bernstein.</note>
  <note>Includes bibliographical references and i(p. 325-340) and index.</note>
  <subject authority="lcsh">
    <topic>Microelectromechanical systems</topic>
    <topic>Mathematical models</topic>
  </subject>
  <classification authority="lcc">TK7875 .P45 2003</classification>
  <classification authority="ddc" edition="21">621.3</classification>
  <identifier type="isbn">1584883065 (alk. paper)</identifier>
  <identifier type="lccn">2002031599</identifier>
  <identifier type="uri">http://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html</identifier>
  <location>
    <url displayLabel="Publisher description">http://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html</url>
  </location>
  <recordInfo>
    <recordContentSource authority="marcorg">DLC</recordContentSource>
    <recordCreationDate encoding="marc">020829</recordCreationDate>
    <recordChangeDate encoding="iso8601">20210628201521.0</recordChangeDate>
    <recordIdentifier source="CEME">12911145</recordIdentifier>
  </recordInfo>
</mods>
