Korvink, J. G., GREINER, ANDREAS

Semiconductors for micro- and nanotechnology, an introduction for engineers an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, c2002. - 340 p. : ill. ; 24 cm.

Includes bibliographical references and index.

3527302573

2002512459

GBA1-Z8391


Semiconductors--Textbooks.
Nanotechnology--Mathematics--Textbooks.
Microtechnology--Mathematics--Textbooks.

QC611 / .K75 2002

621.38152