Korvink, J. G., GREINER, ANDREAS Semiconductors for micro- and nanotechnology, an introduction for engineers an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, c2002. - 340 p. : ill. ; 24 cm. Includes bibliographical references and index. ISBN: 3527302573 LCCN: 2002512459 Nat. Bib. No.: GBA1-Z8391 Subjects--Topical Terms: Semiconductors--Textbooks.Nanotechnology--Mathematics--Textbooks.Microtechnology--Mathematics--Textbooks. LC Class. No.: QC611 / .K75 2002 Dewey Class. No.: 621.38152