Campbell, Stephen A <br/><br/>
The science and engineering of microelectronic fabrication 

 - NEW YORK  OXFORD UNIVERSITY PRESS  2001 
 - XIV,604P 
<br/><br/><label>ISBN: </label>0-19-513605-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>SEMICONDUTOR-DESIGN AND CONSTRUCTION MICROELECTRONIC FABRICATION
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM