TY  - BOOK
AU  - Campbell, Stephen A
TI  - The science and engineering of microelectronic fabrication
SN  - 0-19-513605-5
U1  - 621.38152 CAM 
PY  - 2001///
CY  - NEW YORK
PB  - OXFORD UNIVERSITY PRESS
KW  - SEMICONDUTOR-DESIGN AND CONSTRUCTION MICROELECTRONIC FABRICATION
ER  -