TY  - BOOK
AU  - Liu , Chang
TI  - Foundations of mems
SN  - 0-13-199204-X
U1  - 621.381 LIU 
PY  - 2006///
CY  - NEW JERSEY
PB  - PEARSON EDUCATION
KW  - MEMS.MICROELECTROMECHANICAL SYSTEMS
ER  -